This guide on 50 DSA patterns helps you recognize common problem types and apply proven approaches to solve coding questions ...

Imec has demonstrated the capability of directed self-assembly (DSA) to pattern line/spaces with a pitch as small as 18nm, using a high-chi block copolymer (high-χ BCP) based process under high volume ...

Through microphase separation, block copolymers (BCPs) can self-assemble into highly uniform, chemically distinct, periodic domains with dimensions and periods at scales of 3–200 nm 1,2 that are ...

There are still some problems to work out, such as cutting defect rates, but directed self-assembly has the potential to reduce the total number of masks. The upcoming 7nm process node presents tough ...

As previous articles in this series have shown, directed self-assembly may be a promising alternative for manufacturers seeking to shrink feature sizes in the face of a stalled exposure tool roadmap.

The Digital Brief is EURACTIV's weekly tech newsletter. Welcome to EURACTIV’s Digital Brief, your weekly update on all things digital in the EU. You can subscribe to the newsletter here. “The EU Chips ...

Imec and Tokyo Electron (TEL) announce that they will accelerate their Directed Self-Assembly (DSA) activities at imec’s recent 300mm fab-compatible DSA process line. Over the past two years, both ...